Discover the engineering behind EUV light generation using tin droplets, laser plasma and a collector mirror to create light with a wavelength of 13.5 nanometers for advanced chipmaking. | ASML
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【ASML如何製造出EUV極紫外光？EUV光源研發的故事👀】​ ​ 在2013年加入ASML以前，Cymer就已經開始EUV光源的研究。目前EUV極紫外光微影成為ASML獨有的技術。波長13.5奈米的EUV極紫外光可以在外太空自然產生，但要讓「EUV極紫外光微影技術」成功，我們必須研發出機台內部可以產生EUV極紫外光的方法。在我們的雷射引發電漿（Laser-Produced Plasma）光源模組中，直徑約25微米的融化錫滴以每秒70米的速度從產生器中發出。當錫滴滴落，它們首先會被低能量的雷射脈衝（Laser Pulse）擊中，被擠壓成煎餅的形狀。接著能量較高的雷射脈衝將變成煎餅形狀的錫滴汽化，以產生電漿，散發出EUV極紫外光。為了產生足夠的EUV極紫外光，讓其可以曝光晶圓，上述步驟必須達到每秒5萬次的頻率！​ ​ 📽 今天ASML的Igor和Danny將在影片中分享自己的職涯經驗，他們一路從雷射引發電漿（Laser-Produced Plasma）光源模組的早期研發，到目前投入半導體量產的EUV極紫外光設備。馬上點擊影片，了解更多！👇​ ​ ​ ----------------
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【ASML如何製造出EUV極紫外光？EUV光源研發的故事👀】​ ​ 在2013年 …
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#semiconductors #asml #euv #deeptech #chipmanufacturing #hardwareengineering #aiinfrastructure | Ali Kamaly
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【ASML Whiteboard Session｜EUV極紫外光的產生☄️】 EUV極紫外光的產生源自於對液態錫液滴發射高能雷射，想更深入了解ASML機台產生EUV極紫外光的完整過程嗎？ 今天Scott為大家分享EUV極紫外光的產生原理：我們如何將CO2 Laser（二氧化碳雷射）的能量提高一萬倍，再將高能雷射導入Vessel中擊打液態錫滴，使其產生EUV極紫外光，並透過Scanner在矽晶片上刻出奈米維度的Patterns。 📽馬上收看Scott最新一期的ASML #WhiteboardSession 🔥 #ASML #EUV | ASML
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Generating EUV light for High NA | ASML | 92 comments
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