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A table-top controller/RF generator with automatic RF/pressure level control, an RF Plasma Hollow Cathode Radical Source (PRS), a manual, cables and a limited warranty of five years.
The Cobra ® ICP plasma source generates high-density reactive species at low pressure. Substrate DC bias is determined by a separate RF generator, enabling independent control of radicals and ions, as ...
Ampleon announces the release of its latest high-power RF transistor, the ART800PE(G), built on the company’s Advanced Rugged Technology (ART). Designed to withstand the harshest operating conditions, ...